F07100 - SEMI F71 - ガス供給システムの温度サイクル試験方法 StdVol-Silicon Materials & Process Control Cell breakage mostly depends on

Cell breakage mostly depends on the stresses induced in the processing

The scope of this Document covers a tier of PDMAT

SEMI G56-93 (first published)

• Scatterometers — Total integrating scatterometers (TIS)

to very fine-grained control

F07100 - SEMI F71 - ガス供給システムの温度サイクル試験方法 StdVol-Silicon Materials & Process Control Cell breakage mostly depends onNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Facilities CommitteeJapan Facilities Committee2002719Japan Regional Standards Committee20029www. semi. org200211 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status